E SC 212 - Undergraduate Level Course - Classroom Presentations

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“Download Turnkey Laboratory” gives you a lab experience complete with video.

E SC 211212 / 213 / 214 / 215 / 216

E SC 212: Basic Nanotechnology Processes

Unit

Lecture Video and PowerPoint Availability 

Associated Laboratory Availability

Topics Covered
Unit 1 - An Introduction to Processing
Lecture 1: Nanofabrication Processing

PPT
PDF
Video

 

Overview Top-down Nanofabrication, Bottom-up Nanofabrication, and Hybrid Nanofabrication
Unit 2 - An Introduction to Uses of Plasma in Processing
Lecture 1: Plasma Basics

PPT
PDF
Video

Template Laboratory

Plasma definitions and how Plasmas are made. Plasma Process Discussions: Additive Plasma Processes, and Subtractive Plasma Processes
Lecture 2: Additive Processes and Sputtering PPT
PDF
Video
  Sputtering as an Additive Process, Examples of Systems and Process Applications
Lecture 3: Plasmas and Deposition PPT
PDF
Video
Template Laboratory Additive Plasma Processes including Plasma Enhanced Chemical Vapor Deposition (PECVD), Plasma Enhanced Atomic Layer Deposition (PEALD), and Application
of PECVD and PEALD

Lecture 4: Subtractive Processes and Etching

PPT
PDF
Video

Turnkey Laboratory Subtractive Processes including Plasma Assisted Cleaning and Dry Etching

Lecture 5: Reactive Ion Etching (RIE)

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Video
  Analysis of Reactive Ion Etching (RIE) including Controlling Etch Profile and Etch Selectivity. Examples
of Making Nano Structures with RIE Techniques
Unit 3 - An Introduction to Wet Etching

Lecture 1: Wet Etching

PPT
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Video
  Etch Methods Definitions and Common Etch Terms. Review of Isotropic vs. Anisotropic Etching
Unit 4 - An Introduction to Basic Pattern Transfer

Lecture 1: Patten Transfer and Lithography Techniques

PPT
PDF
Video
Template Laboratory
Turnkey Laboratory
Introduction to Pattern Transfer Including Contact Lithography, Dip-pen Lithography, Stamp Lithography (Micro-Contact Printing), Imprint Lithography, Block Copolymer Pattern Development and Transfer
Unit 5 - Chemical Vapor Deposition
Lecture 1: Typical LPCVD Systems/Hardware and Top Down Applications PPT
PDF
Video
Template Laboratory
Turnkey Laboratory
Typical LPCVD Systems/Hardware, Top-down Applications, 2D Materials (thin Films vs. Growth)
Lecture 2: Bottom up Applications/1D Materials PPT
PDF
Video
  Bottom-up Applications, 1D Materials (Nanowires, VLS Growth)
Unit 6 - Physical Deposition
Lecture 1: Physical Vapor Deposition PPT
PDF
Video
Template Laboratory
Turnkey Laboratory
An Overview of Common PVD Practices to include Thermal and E-gun Evaporation, Sputtering, and Laser Ablation
Unit 7 - Advanced Etch Systems
Lecture 1: The Tools for Plasma Removal Processes

PPT
PDF
Video

Template Laboratory
Turnkey Laboratory

Etch sytems, cluster tools