E SC 214 - Undergraduate Level Course - Classroom Presentations

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Lab Mode Availability:
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“Download Turnkey Laboratory” gives you a lab experience complete with video.

E SC 211212 / 213 / 214 / 215 / 216

E SC 214: Patterning for Nanotechnology

Unit

Lecture Video
and PowerPoint Availability 

Associated Laboratory Availability

Topics Covered
Unit 1 - Advanced Lithography General Information
Lecture 1: Some Basics
of Photolithography

PPT
PDF
Video

E SC 214 Labs

Resist information, primer technologies, electromagnetic spectra, post-exposure bake, development
Unit 2 - Advanced Lithography Tool Technologies
Lecture 1: Maneuvering Light

PPT
PDF
Video

E SC 214 Labs

Optical considerations, anti-reflective coatings, alignment and exposure systems
Unit 3 - Advanced Lithography and Resists
Lecture 1: Introduction to Resists

PPT
PDF
Video

E SC 214 Labs

Photoresists Overview, SU-8 2000 Photoresist Series, AZ nLOF 2000 Photoresist Series, 495K & 950K PMMA Photo and E-beam Resists in Anisole, ZEP-520A E-beam Resist
Unit 4 - Novel Lithography Techniques
Lecture 1: Introduction to Other Pattern Transfer Approaches

PPT
PDF
Video

E SC 214 Labs 

Nanoimprint Lithography, UV Molding, Edge Lithography, Stamp Lithography, Probe Lithography, Self-Assembly Lithography, Block Copolymer Patterning
Unit 5 - Novel Lithography Techniques: Block Copolymer Patterning
Lecture 1: Further Introduction to Other Pattern Transfer Approaches

PPT
PDF
Video

E SC 214 Labs 

Block Copolymer Patterning