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Undergraduate Level Nanotechnology Courses:

Classroom Presentations & Laboratory Activities


These are a set of six nanotechnology classroom presentations corresponding to the set of six laboratory activities. Classroom presentations and labs can be rearranged to accommodate new course arrangements. Suitable for two-year degree programs, for certificate programs, and for freshman-sophomore use in four-year degree programs.

The NACK Center is committed to supporting the development of two-year degree programs in micro- and nanotechnology across the country by offering teaching resources suitable for the post-secondary level.  Read more.

 

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ESC 211: Materials, Safety, and Equipment Overview for Nanotechnology
This course provides an overview of the materials, safety and equipment issues encountered in the practice of "top down" and "bottom up" nanofabrication. It focuses on safety, environmental and health issues in equipment operation and materials handling as well as on cleanroom protocol. Topics to be covered include: cleanroom operation, OSHA lab standard safety training, health issues, Biosafety Levels (BSL) guidelines, and environmental concerns.

PresentationsESC 211 Safety
Safety & Environmental Concerns
Vacuum Function, Operation & Systems
Materials Overview

General Processing Concerns, Contamination & Damage
Basic Characterization Tools

Labs
Lab Overview
Lab 1: EHS: Chemical & Materials Overview
Lab 2: EHS: Equipment Safety Awareness
Lab 3: Vacuum Equipment Simulation Lab with EquipSim
Lab 4: Vacuum Equipment Components & Systems Part 1
Lab 5: Vacuum Equipment Components & Systems Part 2
Lab 6: Introduction to Metrology & Characterization



ESC 212: Basic Nanotechnology Processes

This course is the hands-on introduction to the processing involved in "top down", "bottom up", and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow needed to fabricate devices and structures. This hands-on exposure covers basic nanofabrication processes including colloidal chemistry, self-assembly, catalyzed nanoparticle growth, lithography, wet and dry etching, physical vapor deposition, and chemical vapor deposition.

Presentations
Introduction to Processing
An Introduction to Basic Pattern Transfer
An Introduction to Wet Etching
An Introduction to Uses of Plasmas in Processing
ESC 212 Imprint Lithography
Chemical Vapor Deposition
Physical Deposition

Labs
Lab Overview
Lab 1: Process Control: SPM Tools
Lab 2: Process Control: C-AFM
Lab 3: Introduction to PVD: Thermal Evaporation of a Microarray
Lab 4: PVD: Evaporator Practice
Lab 5: Self Assembly
Lab 6: Introduction to Top-down Lithography: Contact & Proximity Lithography
Lab 7: PVD: Schottky-Ohmic Contact Lab
Lab 8: Liftoff and Surface Modification Lab
Lab 9: PVD: Gold Nucleation Analysis

Lab 10: Introduction to Plasma-based Processing
Lab 11: Reactive Ion Etching (RIE)
Lab 12: Introduction to LPCVD & PECVD
Lab 13: Scanning Electron Microscopy



ESC 213: Materials in Nanotechnology
This course is an in-depth, hands-on exposure to materials fabrication approaches used in nanofabrication. Students learn that these processes can be guided by chemical or physical means or by some combination of these. Hands-on exposure will include self-assembly; colloidal chemistry; atmosphere, low-pressure and plasma enhanced chemical vapor deposition; sputtering; thermal and electron beam evaporation; nebulization and spin-on techniques.
ESC 213 Colloidal Particles

Presentations
An Introduction to Colloidal & Self-assembled Materials
Introduction to Nanoparticles & Nanostructures
Introduction to Nanoparticle Synthesis and Applications
Quantum Dots
Micro- & Nano-materials in Bio-applications
PDMS:  An example of Versatile Material for Micro- & Nanotechnology

Labs
Lab Overview
Lab 1 & 2: Block Copolymer Films
Lab 3 & 4: Catalytic Growth of Silicon Nanowires
Lab 5: Dye-Sensitized Nanocrystalline Solar Cells
Lab 6: Colloidal Chemistry - Nanoparticles
Lab 7: Nickel Nanowires
Lab 8: Statistical Process Control


ESC 214: Patterning for Nanotechnology  
This course is a hands-on treatment of all aspects of advanced pattern transfer and pattern transfer equipment including probe techniques; stamping and embossing; e-beam; and optical contact and stepper systems. The course is divided into five major sections: pattern generation processes; photolithography; particle beam lithographic techniques; probe pattern generation; and embossing lithography, step-and-flash, stamp lithography, and self assembled lithography.
ESC 214 Contact Exp

Presentations
Lecture Overview
Advanced Lithography Tool Technologies
Advanced Lithography General Information
Advanced Lithography & Resists
Novel Lithography Techniques

Labs
Lab Overview
Lab 2: Pattern Transfer: Photolithography Practice

Lab 4: Pattern Transfer: Microcontact Printing

Lab 5 & 6: Multiple Level Pattern Transfer: Photolithography

Lab 7: E-Beam Lithography


ESC 215: Materials Modification in Nanotechnology
This course will cover in detail the processing techniques and specialty hardware used in modifying properties in nanofabrication. Material modification steps to be covered will include etching, functionalization, alloying, stress control and doping. Avoiding unintentional materials modification will also be covered as well as hands-on materials modification and subsequent characterization.
ESC 215 Cluster Tool

Presentations
PECVD
Dry Etch Chemistry
Advanced Etch Systems
Doping & Conductivity Control
Oxidation

Labs
Lab Overview
Lab 1: Microfluidics

Lab 2: Furnace Oxidation

Lab 3: Ion Implantation Simulation

Lab 4: Stiction

Lab 5: Doping


ESC 216: Characterization, Testing of Nanotechnology Structures and Materials
This course examines a variety of techniques and measurements essential for testing and for controlling material fabrication and final device performance. Characterization includes electrical, optical, physical, and chemical approaches. The characterization experience will include hands-on use of tools such as the Atomic Force Microscope (AFM), Scanning Electron Microscope (SEM), fluorescence microscopes, and fourier transform infrared spectroscopy.
ESC 216 AFM

Presentations
Characterization

Labs
Lab Overview
Lab 1: Process Control: Intermittent Mode & Non-Contact Mode AFM

Lab 2: Magnetic Force & Scanning Tunneling Microscopy

Lab 3: Transmission Electron Microscopy

Lab 4: Introduction to FESEM

Lab 5 & 6: SEM/AFM Practice Labs

Lab 7: Process Control: SPM Imagine Analysis/Processing Software

 



To see the complete list of resources that the NACK Center offers, visit: www.nano4me.org/educators.